一种用石英多晶材料作为弹性元件的应变式压办传感器

A Type of Resistance Strain Transducer Using Quartz as Elastic Element

本文介绍了一种新的应变式压力传感器,它利用石英多晶作为弹性元件,用阴极溅射法制成应变电阻。本文对传感器的结构设计、制作工艺都做了较详细的探讨和研究,并制成一个传感器样品,对其作了一系列性能测试。

The relation between pressure and strain of an elastic element and a new technological process, so called the negative pole emission,are studied in this paper. As a result, a new type of transducer, the resistance strain gauge testing specimen, has been made with quartz as elastic element. Also studied in this paper are structural design, material selection and the technological process of this type of transducer. The transducer has a series of advantages, such as small hysteresis error,high temperature stability and so forth. The experiments show that this type of transducer has high precision and good characteristics.