三光束飞秒激光干涉在GaP，ZnSe表面诱导二维复合纳米-微米周期结构

Two-dimensional complex nano-micro patterning on GaP and ZnSe surface created by the interference of three femtosecond laser beams

报道了三光束飞秒激光干涉在GaP和ZnSe晶体表面诱导二维复合纳米-微米周期结构.改变三束光的偏振组合方式,可以得到不同的纳米-微米复合结构.理论计算了相应偏振条件下光场强度分布、椭偏度分布和偏振方向分布.实验和理论计算结果表明,烧蚀斑上的微米长周期结构是由三光束干涉的强度花样决定,短周期纳米结构是由光场的偏振干涉花样决定.这些研究在纳米材料制备、超高密度光存储以及材料特性周期性调制等方面有很大的应用前景.

In this paper, we reported the two-dimensional periodic nano-micro complex structures on GaP and ZnSe crystals surface created by the interference of three femtosecond laser beams. Different types of nano-patterns were obtained by arranging the laser polarization combination of the three beams. In order to understand the formation of these nanopatterns, we theoretically calculated the distributions of laser intensity and polarization. The experimental and theoretical results indicate that the long periodic microsturctures are determined by the interferential intensity pattern, and the short periodic nanostruetures were determined by the interferential polarization pattern. These researches haue huge potential applications in nanopattering of semiconductors and dielectrics.