钛合金表面非平衡磁控溅射沉积NiCoCrAlY涂层

Study on NiCoCrAlY Coating Using Unbalanced Magnetron Sputtering on Titanium Alloy Surface

采用非平衡磁控溅射技术在TCA钛合金表面沉积NiCoCrAlY抗烧蚀涂层，分析了不同溅射工艺下沉积涂层的微观结构以及对涂层组织的影响。结果表明：溅射沉积涂层成分主要与靶材成分均匀性有关，沉积涂层的成分与靶材成分基本一致；溅射过程中由于涂层表面不均匀的择优生长，造成涂层表面粗糙度有提高的趋势，涂层表面会产生大量的微米级的颗粒状突起以及出现少量直径约十几个微米的圆丘形突起，都呈现中心高、四周低的特征。实验制备涂层厚度在7～60μm之间，组织致密，厚度均匀，与基体结合良好，涂层增厚与溅射时间呈线性关系。XRD分析说明涂层表面主要是AlNi3，Al0.9Ni0.22相，其他涂层元素以非晶态存在，随涂层沉积时间延长，涂层表面晶态结构发生破坏，涂层元素之间形成的化合物相趋于消失。

NiCoCrAlY coating was synthesized on TC4 alloy surface using unbalanced magnetron sputtering technology. The microstructure and organization of the coating under different deposition processes were analyzed. It was found that the coating composition by sputtering was mostly related to the target＇s uniformity and was basically consistent with it. During the deposition, the coating roughness increased with the uneven preferential growth of the coating, and a large number of micro-granular as well as some pellet protuberances over 10 microns in diameter appeared, all of which were characteristic of being high in the center and low around. The coatings exhibited a tight organization, uniform thickness within 7-60 um, which had a linear relationship with the sputtering time, and also a good combination with the substrate. XRD analysis indicated that the coatings were mainly AlNi3, Alo 9 Ni4.22, and amorphous phase composed by other elements. With the increase of the deposition time, the crystalline structure in the coatings＇ surface was destroyed and the compounds phase formed between elements gradually disappeared.