空心阴极与多弧离子镀TiN薄膜的表面形貌及性能

Surface morphology and properties of the hollow cathode ion-plating and multi-arc ion plated TiN film

分别采用多弧镀、空心阴极离子镀及电子束强化多弧镀的方法在高速钢表面制备TiN薄膜,对其进行表面形貌及性能的研究。经光学显微镜、扫描电镜(SEM)、激光共聚焦显微镜(LSCM)对TiN薄膜表面形貌及断口观察分析表明,空心阴极离子镀薄膜表面较为平整,无熔滴颗粒(大颗粒)存在,空心阴极发射的电子束对多弧离子镀薄膜表面熔滴颗粒数量和尺寸有着明显的改善作用。随着电子束功率提高,多弧离子镀薄膜表面熔滴颗粒尺寸呈明显减小趋势,且数量呈减少趋势。

TiN film are made by means of multi-arc ion plating, hollow cathode ion-plating and ion beam assist multi-arc ion plating respectively for study its surface morphology and properties. The observation and analyses, with optical microscope, scan electrical mirror （SEM） and laser scan centered microscope （LSCM）, show that the film surface is smooth and without large particles with hollow cathode ion-plating. The Electron Beam from hollow-cathode can obviously improve the amount and size of the droplet in the film surface made by multi-arc ion plating. As the power of the electron beam increase, the size and amount of the droplet will decrease.