脉冲电子束系统沉积高温超导薄膜研究

The Study of High Tc Superconductor Films Deposited by Pulsed Electron Beam System

高温超导薄膜生长是研究超导现象和超导器件的基础,一直是凝聚态物理研究的一个重要课题。各种各样的薄膜生长方法都被应用于高温超导薄膜的生长研究。本文采用一种崭新的薄膜沉积设备———脉冲电子束沉积系统(PED)成功制备出了NCCO,LSCO高温超导薄膜,并通过优化沉积参数,获得了具有良好表面形貌和超导转变特性的高温超导薄膜。

Film deposition technique of High Tc superconductor is the foundation of superconducting physics and devices researching.Many experimental methods such as PLD,MBE are carried out on it.In this paper,we use a novel method named PED（pulsed electron beam） system to deposit the LSCO and NCCO films.In an appropriately prepared condition,we obtained some films with good surface morphology and superconductivity.The results proved that PED could be an advisable method for superconducting film deposition.