陶瓷膜制备新工艺─ASSP法的基本原理和特点

Principle and Features of ASSP Method a New Process of Ceramic Thin Film Preparation

以常用无机盐为前驱体，通过化学合成固相粒子排布（ASSP—arrangementofsynthesizedsolidPartical）途径，可以方便地制备绝大多数氧化物陶瓷薄膜。本文介绍了这种制膜方法的基本原理和工艺特点，对薄膜制备过程中的普遍规律进行了简要的分析。

Most of oxide ceramic thin films have prepared conveniently by ASSP (arrangement of synthesized solid particle) method with common inorganic precussors. The principle and features of ASSP process and the universaal laws in film forming have been introduced and discussed briefly in this paper.