摘要
为了制作局部为三维结构的金属模具微型腔,实验研究了一种组合加工新工艺,即先用紫外线光刻和电铸成形(准LIGA)技术在模具基底上制作二维金属微型腔,再用微细电火花成形加工(EDM)技术对微型腔的局部进行修形,得到局部为三维结构的微型腔,电火花修形的位置根据微型腔结构的设计要求而定.以制作聚合物微流控芯片用的金属模具为试件,以微细电火花成形加工中影响工件表面粗糙度的因素分析为理论指导,应用该方法制作了局部侧壁倾斜的三维微型腔.根据测量结果,两边侧壁与水平方向的夹角分别为49.6°和46.4°,倾斜侧壁的表面粗糙度Ra为0.391μm.
A combined process to fabricate micro metal mold cavity with local three-dimension （3D） structure was studied in the experiment. First, a two-dimension （2D） microstructure was fabricated on the metal plate with uhraviolet-lithographie, galvanoformung, abformung （UV-LIGA） technology. Then the 2D microstructure was transformed into 3D figure with micro electro-discharge machining （EDM） technology in the parts according to the design. Based on analysis of the factors influencing the surface roughness in micro EDM, a 3D micro mold cavity with slope sides locally was fabricated in the Ni mold of polymer microfluidic chip. Measuring results show that the angles of the two slope sides are 49. 6° and 46. 4°, respectively, and the surface roughness Ro of the slope sides is 0. 391μm.
出处
《纳米技术与精密工程》
EI
CAS
CSCD
2010年第1期90-94,共5页
Nanotechnology and Precision Engineering
基金
国家科技支撑计划资助项目(2006BAF04B13)
国家重点基础研究发展计划(973)资助项目(2007CB714502)
