微电容加速度计结构的热固耦合拓扑优化

Thermo-structural Coupling Topology Optimization for Structure of Micro-capacitive Accelerometer

基于连续体结构拓扑优化的SIMP材料插值模型,建立了热固耦合场结构的有限元控制方程;通过伴随矩阵方法,研究了热固耦合场的敏度分析问题;以叉指式微电容加速度计质量块受热膨胀后,在加速度检测方向的最大形变不大于某一给定值为目标,以质量块的体积比为约束条件,建立了质量块结构的热固耦合拓扑优化模型;采用优化准则算法进行迭代求解后,得到了微电容加速度计质量块的最优拓扑形式,当工作温度在0～300℃范围内变化时,该拓扑形式在加速度检测方向的最大形变仅为23.9nm。

Based on the SIMP material interpolation model of the continuum structural topology optimization, the finite element governing equations of thermo-structural coupling were established. Through the adjoint matrix method, the sensitivity analysis of the thermo-structural coupling field was studied. To use that the maximum heated deformation of the mass-block of a comb micro-capacitive accelerometer at the direction for testing acceleration was less than a given value as objective function, and the volume as the constrained condition, the thermo-structural coupling topology optimization model for the mass-block structure was established. By adopting optimization criterion algorithm the optimal topology form of the micro-capacitance accelerometer mass-block was achieved. In this topology form, the maximum deformation of the mass-block at the direction for testing acceleration was only 23.9nm at the operating temperature range of 0 - 300℃.