摘要
采用非平衡磁控溅射离子镀技术制备了一组不同Cr含量的掺铬类石墨非晶碳膜。测量了薄膜的硬度、内应力以及干摩擦条件下的摩擦系数和比磨损率,利用X射线光电子能谱(XPS)和扫描电子显微术(SEM)分析了薄膜的成分和表面形貌。实验结果表明,掺铬类石墨膜的力学和摩擦学性能均强烈地受到薄膜Cr含量的影响。掺杂铬对类石墨膜具有显著的去应力和软化作用。适量铬的加入不仅能进一步改善这种非晶碳膜的磨擦学性能,而且也有助于降低它的表面粗糙度并提高其致密性。分析结果表明,掺铬类石墨膜的力学和摩擦学性能随着Cr含量增大的变化趋势与薄膜中碳的价键结构演变存在着明显的相关性。
Cr-doped graphite-like amorphous carbon films with varied Cr content are deposited by unbalanced magnetron sputter ion plating technique.The film's hardness,internal stress,coefficient of friction and specific wear rate in dry friction condition are tested.X-ray photoelectron spectroscopy(XPS) and scanning electron microscopy(SEM) are used to characterize the films' components and surface morphology.The experimental results show that mechanical and tribological properties of the Cr-doped graphite-like carbon films all are strongly dependent on the Cr content in the films.Cr incorporation has remarkable relieving stress and softening film effect on the graphite-like carbon films.Appropriate doping of Cr into the films can not only further improve the film's tribological properties,but also reduce the films' surface roughness and improve its compactness.The analysis results show that the development trend of mechanical and tribological properties of the Cr-doped graphite-like carbon films with increasing Cr content are dependent obviously on the evolvement of valence bond structure of carbon element in the films.
出处
《西安理工大学学报》
CAS
北大核心
2009年第4期394-399,共6页
Journal of Xi'an University of Technology
基金
国家863计划资助项目(2005AA33H010)
关键词
掺铬非晶碳膜
力学性能
磨擦学性能
价键结构
Cr-doped amorphous carbon film
mechanical properties
tribological properties
valence bond structure