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非接触式激光平面检测系统 被引量:8

Non-contact Laser Flatness Measurement System
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摘要 传统的接触式平面检测精度低、稳定性差及对对象物检测条件要求苛刻,已逐渐被现代非接触式平面检测所替代。非接触式激光平面检测系统以其高精度、高分辨率及不受对象物材质、颜色或倾斜度的影响等优点,可对任何对象物进行平面检测。介绍系统结构和激光位移传感器的工作机理,并进行平面定性检测和定量检测试验,用OpenGL绘制及拟合三维曲面。试验结果表明,该系统平面检测结果较好地反映出对象物平面起伏情况,并且达到系统的精度要求。 The traditional contact flatness measurement with low accuracy, poor stability and harsh condition of the measured target, which has been increasingly substituted by the modern non- contact flatness measurement. The non- contact laser flatness measurement system can measure the surface flatness of any target without being affected by the material,color or angle of the target, which holds the merits of high accuracy and excellent resolution. The overall structure of the system and the working principle of the laser displacement sensor are presented. The qualitative test and the quantitative test of flatness measurement have been carried on, and 3 -D fitting curved surface has been drawn in OpenGL. It is proved that the results of the test reflect the surface undulation situation and reach the precision.
出处 《现代电子技术》 2010年第3期134-136,146,共4页 Modern Electronics Technique
关键词 激光位移传感器 非接触式平面检测 平移台控制 OPENGL 三维拟合曲面 laser displacement sensor non - contact flatness measurement control of X - Y stage OpenGL 3 - D fittingcurved surface
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