低分子聚碳硅烷制备Si-C-N复合超细微粉

SYNTHESIS OF Si-C-N ULTRAFINE COMPOSITE POWDER FROM LOW_MOLECULAR POLYSILANE

以富碳低分子聚碳硅烷（ＬＰＳ）为原料，利用其原料的特点，采用气相反应热裂解方法制备出Ｓｉ－Ｃ－Ｎ复合微粉．系统地讨论了合成工艺条件对采用富碳有机硅原料制备含Ｎ的Ｓｉ－Ｃ－Ｎ复合微粉产物的性质以及形貌、组成，尤其是微粉中Ｎ含量等的影响，并较详细地探讨了ＮＨ３与ＬＰＳ分解反应的过程及与ＬＰＳ制备ＳｉＣ微粉的反应过程的差别．所合成的无定形Ｓｉ－Ｃ－Ｎ复合微粉：粒径３０—５０ｎｍ，球形，含碳（质量分数，下同）１０％—３０％，含氮４％—２０％左右．

Using low_molecular polysilane (LPS) as raw material, which is carbon_rich and oxygen_containing, Si-C-N ultrafine composite powder was synthesized by vapor reaction decomposition. The effects of the processing conditions on chemical content, especially N content in the powder, particle morphology were mainly investigated. The reaction process and mechanism of LPS and NH 3 and the difference of these two materials in the production of SiC powder was researched. The obtained Si-C-N ultrafine composite powder has particle size 30—50nm, spherical in shape, amorphous state, containing C 10%—30%(in mass), N 4%—20%(in mass).