溶胶-凝胶法制备TiO_2-SiO_2复合薄膜的波导特性研究

OPTICAL WAVEGUIDE PROPERTIES OF TiO 2-SiO 2 COMPOSITE FILMS FABRICATED BY THE SOL-GEL PROCESS

研究了采用溶胶－凝胶法制备的ＴｉＯ２－ＳｉＯ２复合薄膜的波导特性．结果表明随着ＴｉＯ２含量和热处理温度的提高，薄膜的波导损耗增大．ＦＴ＿ＩＲ光谱，ＸＲＤ和ＡＦＭ分析表明：这种损耗主要来自于薄膜中的微区不均匀和由于薄膜表面的粗糙度增大而产生的光散射的影响．通过透射光谱计算得到了薄膜的折射率和消光系数的色散关系以及它们与工艺之间的关系．

The optical waveguide properties of TiO 2-SiO 2 composited thin films fabricated by the sol-gel proccess were studied. With increasing of TiO 2 content and heat treatment temperature, the loss of waveguide of thin films is increased. FT_IR spectra, XRD and AFM analysis show that this loss results from the homogeneity of thin films due to non_uniform distribution of TiO 2 in the film and roughness of the film surface. The refractive indices and extinction coefficients as the function of wavelength were calculated through the optical transmission spectra. The relations of fabricating technology and refractive indices, extinction coefficients were also studied.