TiO_2纳米粉末的热壁低压MOCVD方法制备

Preparation of TiO 2 Nano Powder by MOCVD Process

采用热壁低压ＭＯＣＶＤ方法制备了ＴｉＯ２纳米粉末。研究了收集区、载气流量和氧气流量对ＴｉＯ２纳米粉末的晶体结构、平均晶粒尺寸和粒度分布的影响规律。采用Ｒａｍａｎ散射、Ｘ射线衍射和透射电子显微镜等技术对ＴｉＯ２纳米粉末进行了表征。

TiO 2 nano powder was prepared by MOCVD process.The effects of collection zone,carrier gas flow rate and oxygen flow rate on the crystal structure,average grain size and size ditribution were studied, and the TiO 2 nano powder was characterized by Raman scattering,X-ray diffraction and transmission electron microscopy,etc.