摘要
采用热壁低压MOCVD方法制备了TiO2纳米粉末。研究了收集区、载气流量和氧气流量对TiO2纳米粉末的晶体结构、平均晶粒尺寸和粒度分布的影响规律。采用Raman散射、X射线衍射和透射电子显微镜等技术对TiO2纳米粉末进行了表征。
TiO 2 nano powder was prepared by MOCVD process.The effects of collection zone,carrier gas flow rate and oxygen flow rate on the crystal structure,average grain size and size ditribution were studied, and the TiO 2 nano powder was characterized by Raman scattering,X-ray diffraction and transmission electron microscopy,etc.
出处
《硅酸盐通报》
CAS
CSCD
1998年第5期8-12,32,共6页
Bulletin of the Chinese Ceramic Society
基金
中科院上海治金所博士后