多孔SiO_2增透膜溶液的工艺研究

Study on the Process of Porous Silica Antireflective Coating Solution

介绍了利用正硅酸乙酯的碱催化，溶胶－凝胶法制备多孔ＳｉＯ２增透膜。较详细地研究了不同配方的溶胶在陈化过程中规律性的变化，涂膜方法采用浸渍提拉法，涂制多孔ＳｉＯ２增透膜的ＫＤＰ晶体在激光波长１０６０ｎｍ，脉冲宽度１ｎｓ，膜层的激光破坏阈值达到７－１０Ｊ／ｃｍ２，涂制增透膜的Ｋ９玻璃和ＫＤＰ晶体，透过率峰值＞９９％

Sol-gel porous silica coating,an antireflective(AR) coating,was synthesised with the addition of ammonia catalyst.The dependence of the viscosity of sol on the reaction or aging time was studied in detail with varied compositions.The peak transmissiviy of coated BK-7 glass and KDP crystal is higher than 99%.The laser induced damage thresholds of this coating were ranged to 7-10J/cm 2,for pulse width 1ns and wavelength=1064nm.