摘要
微光机电系统(MOEMS)技术是全光网络光开关的关键技术。文章介绍了MOEMS技术和MOEMS光开关,分析了典型二维(2D)和三维(3D)微反射镜MOEMS光开关的实现机理与特性,并介绍了静电驱动、二维微反射镜MOEMS光开关的控制系统,以期对MOEMS光开关的研究者提供参考价值。
Micro-Opto-Electro-Mechanical Systems(MOEMS) technology is the key technology in all-optical network switch.The paper introduces MOEMS technology and MOEMS optical switch,gives an analysis to the implementation mechanism and characteristics of typical two-dimensional(2D) and three-dimensional(3D) micro-mirror MOEMS optical switch.The research has been done on the electrostatic-driven,two-dimensional micro-mirror control of MOEMS optical switch system.
出处
《黄石理工学院学报》
2009年第6期4-6,共3页
Journal of Huangshi Institute of Technology
基金
黄石市科技局项目资助