不同晶粒尺寸对CVD金刚石膜机械性能的影响

Influence of different grain size on mechanical properties of CVD diamond film

采用热丝辅助化学气相沉积(CVD)工艺制备出纳米、微米及细晶粒金刚石膜材料。观察了这三种金刚石膜的表面形貌并对上述金刚石膜的物理机械性能包括抗弯强度和耐磨性进行了实验性研究。结果表明,细晶粒结构的金刚石膜具有最高的抗弯强度,纳米结构的金刚石膜耐磨性最好。综合两个技术指标认为:细晶粒金刚石膜是三种晶粒结构中最佳的刀具制造材料。

In this paper, the nano-diamond films, the fine grain diamond films and the micrometer diamond films were made by using the hot-filament CVD technique. The surface morphology of three kinds of diamond films was investigated and their mechanical properties including bending strength and wear resistance were studied. The results show that the fine grain diamond film has the highest bending strength and the nano-diamond film has the best wear resistance. So the fine grain diamond film is the best material fitting for cutting tools in the three kinds of diamond films.