基于电流密度在线监控的电镀工艺过程控制系统

Control System for Electroplating Process Based on On-line Current Density Monitoring

针对电镀过程中由人为因素所引起的能耗问题,为提高镀件质量,节能降耗,研制了一种以高频开关电镀电源为核心的基于电流密度在线监控的电镀工艺过程控制系统。该系统由上位机、电流密度采集系统和数字化电镀电源装置组成,实现了电流密度的在线检测与控制。镀层变化和系统能耗实验表明:该系统实现了电镀工艺工程能量的合理配置,在额定输出范围内具有较低的单位能耗和较高的效率,工艺质量优良,对不同规格的电镀工件具有广泛的适应性。

In order to improve quality of workpieces and save energy, a control system for electroplating process based on on-line current density monitoring, using high-frequency switching electroplating power supply as the system platform, was presented. The system includes host computer and current density acquisition system and power supply, and realizes the on-line monitoring and control for current density. The experiments results of coating change and system energy consumption indicate that the control system achieves rational energy allocation of electroplating process engineering. Under the rated output condition, the test state that the system has lower energy consumption for unit-thickness and higher efficiency and the excellent process quality and a wind range of adaptability for the different specifications workpieces.