基于硅模具的Zr基非晶合金微成形工艺研究

Study on Micro-forming Process of Zr-based Bulk Metallic Glass with Silicon Mold

研究了利用硅模具进行微成形的热压工艺,针对超塑性成形Zr65Cu17.5Al10Ni7.5非晶合金微零件过程进行分析,提出精确去除非晶合金飞边的方法,并采用质量分数为40%的KOH溶液(温度为80℃)腐蚀去除硅模具得到微型零件。利用该工艺成功制备出尺寸精度很高、模数为0.1mm、齿数为20、厚度为300μm的非晶态微型直齿圆柱齿轮。该工艺用于制备高性能非晶合金微型零件优势明显,尤其对于芯部是复杂结构的微型零件更具成形优势。

Micro--forming hot embossing process with silicon mold was studied, and superplastic micro--forming of Zr65 Cu17.5 All0 Ni7.5 bulk metallic glass micro--parts was analyzed. Mechanical grinding was put forward to accurately remove the flashes of bulk metallic glass micro--parts. The micro--parts with silicon mold were then dipped into potassium hydroxide solution at 80℃ to dissolve the mold and obtain the others. The process is utilizd and a good dimensional accuracy for an amorphous micro--spur gear with 0.1 module,20 teeth and 300 micrometers in thickness is obtained. It follows from the results that the technology is promising for manufacturing high--performance complex micro amorphous components especially for those with complex structure in the core.