摘要
针对微观黏附中出现的"突跳"问题,建立了正弦分布粗糙面黏附模型;基于Casimir效应推导出Casimir力表达式;基于Wigner-Seitz微观理论,推导出包含斥力项的Hamaker力表达式;经过对黏附过程数值仿真,发现存在两个"突跳"过程,曲线存在两个拐点,而非目前研究所得的单个"突跳"过程;仿真结果同相关实验对比,结果符合较好.从而为微纳器件检测和原子分子操纵等提供理论基础.
Aiming at solving the “snap back” problem in the stiction, the sine rough surface model is established. Based on the Casimir effect, the Casimir force is obtained. Based on the micro scopic Wigner-Seitz principle, the Hanaker force is derived, which includes the repulsive force. The stiction force is simulated and the two “snap back” points are found. The curve of the stiction force has two break points, which is in agreement with the experiment.
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
2010年第2期1175-1179,共5页
Acta Physica Sinica
基金
国家自然科学基金(批准号:10476019)
西安市应用材料创新基金(批准号:XA-AM-200802)资助的课题~~