蓝宝石基片上制备双面Tl_2Ba_2CaCu_2O_8超导薄膜

Fabrication and properties of double-side Tl_2Ba_2CaCu_2O_8 superconducting thin film on sapphire substrate

在蓝宝石基片上,以CeO2为缓冲层制备了高质量的双面Tl2Ba2CaCu2O8(Tl-2212)超导薄膜。以金属铈靶作为溅射源生长了c轴取向的CeO2缓冲薄膜,并对CeO2薄膜进行了高温处理,有效改善了其结晶质量和表面形貌。采用两步法制备了双面的Tl-2212超导薄膜。XRD测试显示,薄膜为纯的Tl-2212相,且其晶格c轴垂直于衬底表面。超导薄膜的Tc为106K,Jc(77K,0T)为3.5MA/cm2,微波表面电阻Rs(77K,10GHz)为390μΩ。

High quality Tl2Ba2CaCu2O8（Tl-2212） superconducting thin films were fabricated on CeO2 buffered double-side sapphire substrates.Using the metal cerium target as the sputtering source,CeO2 buffer films with c-axis orientation were deposited by RF reactive magnetron sputtering technique,and high temperature treatment was carried out to the CeO2 films to improve the crystal quality and surface morphology.Then,two-side Tl-2212 superconducting films were fabricated on CeO2 buffered sapphire substrates using two-step technique.XRD showed that the films were pure Tl-2212 phase with c-axis perpendicular to the substrate surfaces.Tc of the Tl-2212 film was 106K,Jc（77K,0T） was 3.5MA/cm2,and Rs（77K,10GHz） was as low as 390μΩ.