激光法气相合成纳米Si/C/N复相粉体

SYNTHESIS OF Si/C/N NANOCOMPOSITE POWDERS BY LASER INDUCED GAS PHASE REACTION

用大功率５ｋＷＣＯ２激光器为能源，以六甲基二硅胺烷［（ＣＨ３）３Ｓｉ］２ＮＨ（简称ＨＭＤＳ）和ＮＨ３为原料，合成纳米非晶Ｓｉ／Ｃ／Ｎ复相粉体。研究了ＨＭＤＳ流量和ＮＨ３对纳米复相粉体组成的影响。ＮＨ３的加入可以大幅度降低纳米复相粉体的碳含量，提高氮含量。Ｓｉ／Ｃ／Ｎ纳米复相粉体的粒径分布范围为１０～５０ｎｍ，为非晶态。

Si/C/N nanocomposite Powder were synthesized by irradiating a mixture of HMDS and NH 3 with a high power CO 2 laser The influences of HMDS flow rate and NH 3 on the nanocomposite powder were studied The results show that increasing HMDS flow rate can increase the carbon and silicon contents slightly The addition of NH 3 can greatly decrease the carbon content,and increase the nitrogen content The as formed powder are arnorphous and the mean particle size is 10～50 nm