一种应用于曝光机的新型z向系统方案及实验研究

The Design and Experimentation Research on a new z-axis System Used in the Mask Aligner

z向系统是接触式曝光机的关键部件之一。设计了一种曝光机的新型z向系统方案,该方案采用气动控制的方式,通过控制气体压力来调整接触力,用空气轴承导向,完成找平、微分离的自动控制。对z向系统设计原理进行了详细介绍,并通过实验对其部分功能进行了验证。

The z-axis system is a key part of the Mask Aligner.A new z-axis system is designed,which is pneumatically controlled and directed by the air bearing.The contact force is adjusted by the gas pressure control,and the automation control of leveling and small separation is achieved.This paper makes detailed description of the design of the z-axis system,and some function of it is confirmed by experimentation.