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退火对大面积CdTe多晶薄膜薄膜的影响 被引量：2

The effect of large scale CdTe polycrystalline film of annealing
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摘要 对近空间升华法制备的大面积(30 × 40 cm^2)CdTe多晶薄膜用不同方法进行退火处理,用XRD、C～V、I～V等研究了退火条件,退火方式对薄膜结构和器件性能的影响.结果表明:刚沉积的CdTe多晶薄膜呈立方相,沿着(111)方向择优取,向而退火后(111)(220)(311)等峰都有不同程度的增加.在纯氧气氛下,400℃退火还出现了新峰.随着退火温度的增加,电导激活能降低.经过连续退火装置在400℃下退火30分钟的电池,1/C^2和V成线性关系,具有较高的掺杂浓度、较理想的二极管因子和较高的转换效率. Large CdTe thin films prepared by close--spaced--sublimation （CSS） technique were annealed. The effect of films＇ structure and properties by annealing was studied by XRD,C-V,I-V. The results showed that the structure of as--deposited CdTe film was cube and that （111）（220）（311） peaks increased after annealed. There appeared new peak in the sample annealed at 400℃ in oxygen. And with the temperature increasing, the activation energy decreased. The results of C-V and I-V characteristics improve that the continuous annealing fashion is suitable for manufacture. apparatus and ultrasonic spraying CdCl2 solution fashion is suitable for manufacture.
作者 王文武 雷智 郑家贵 冯良桓 邓懿 蔡亚萍 张静全 黎兵 武莉莉 李卫
机构地区 四川大学材料科学与工程学院
出处 《四川大学学报（自然科学版）》 CAS CSCD 北大核心 2010年第1期146-150,共5页 Journal of Sichuan University(Natural Science Edition)
基金 863重点项目(2003AA513010) 博士点基金项目(20050610024) 四川省应用基础(2006J13-083)
关键词 大面积CdTe多晶薄膜 退火 large scale CdTe polycrystalline film, anneal
分类号 O736 [理学—晶体学]
  • 相关文献

参考文献8

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二级参考文献19

  • 1郑华靖,张静全,冯良桓,蔡伟,郑家贵,谢二庆.太阳电池中CdTe多晶薄膜沉积制备及其性能[J].四川大学学报（工程科学版）,2005,37(2):59-62. 被引量：4
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共引文献8

同被引文献29

  • 1陈卫东,冯良桓,雷智,张静全,武莉莉,蔡伟,蔡亚平,姚菲菲,李卫,黎兵,郑家贵.用磁控溅射和退火方法制备AlSb多晶薄膜[J].Journal of Semiconductors,2006,27(3):541-544. 被引量：8
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四川大学学报（自然科学版）
2010年 第1期

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