摘要
对Co/Pt多层膜进行X射线小角衍射分析,测量出多层膜的周期厚度,解释多层膜小角衍射主峰之间出现次峰的现象,并确立了次峰个数与膜周期数之间的关系。
Small-angle X-ray diffraction has been used to study the microstructure of Co/Pt multilayer film.The period thickness has been deduced from the Bragg equation with refraction correction.The phenomenon of secondary peaks appearing among primary peaks has been explained.The function relation between the secondary peak number and the period number in multilayer film has been established.
出处
《贵金属》
CAS
CSCD
北大核心
1998年第4期29-32,共4页
Precious Metals
基金
云南省应用基础研究基金
中国有色金属工业总公司高技术项目