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Resonant characteristics of microcantilever by using self-mixing interferometer based on phase reconstruction method 被引量:2

Resonant characteristics of microcantilever by using self-mixing interferometer based on phase reconstruction method
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摘要 The self-mixing interferometer is used to investigate the characteristics of resonant frequency of the microresonator, which is excited by a sinusoidally driven loud-speaker. The detected self-mixing signal is processed by the phase reconstruction method. The lst-order resonant frequency of the microresonator is measured to be 4.437 kHz with full-width at half-maximum (FWHM) of 0.13 kHz. The measurement results are verified by the sinusoidal phase modulating (SPM) interferometer. The self-mixing interferometer is used to investigate the characteristics of resonant frequency of the microresonator, which is excited by a sinusoidally driven loud-speaker. The detected self-mixing signal is processed by the phase reconstruction method. The lst-order resonant frequency of the microresonator is measured to be 4.437 kHz with full-width at half-maximum (FWHM) of 0.13 kHz. The measurement results are verified by the sinusoidal phase modulating (SPM) interferometer.
出处 《Chinese Optics Letters》 SCIE EI CAS CSCD 2010年第2期177-180,共4页 中国光学快报(英文版)
基金 supported by the National Natural Science Foundation of China(No.60578051) the Key Basic Research Program of Science and Technology Commission of Shanghai Municipality(No. 07JC14056).
关键词 INTERFEROMETERS Resonators Interferometers Resonators
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