CVD法制备高纯钛形核过程动力学分析

The analysis of CVD process for high purity titanium

实验用了化学气相沉积(CVD)法制备高纯钛,对高纯钛制备中的形核过程进行了热力学和动力学分析,实验得出:沉积区温度应控制在1350K^1450K。

Experiments using chemical vapor deposition（CVD） preparation of high pure titanium,preparation of high pure titanium nucleation process of thermodynamic and kinetic analysis were made.Experiment results： deposition zone temperature should be controlled at 1350K～1450K.