薄膜应变栅称重传感器的研制

Research of Thin-film Strain-gauge Weighing Sensor

运用薄膜沉积技术，制作了薄膜应变栅式称重传感器。性能测试表明，由于克服了粘接胶所带来的弊病，该类传感器与贴片式传感器相比具有滞后和蠕变小，稳定性和可靠性高的特点。

The thin-film strain-gauge weighing sensors were fabricated by thin film techniques. The output characteristics of the sensors showed that thin-film strain gauges had excellent performances compared with conventional metal foil gauges. This kind of sensors had high stability for eliminating the necessity of adhesive which introduced errors in hysteresis and creep.