摘要
随着我国半导体工业集成电路（IC）业的快速发展，硅材料加工用金刚石工具具有非常大的市场。本文从硅材料及其加工用金刚石工具与加工技术的发展现状与趋势进行了简要综述。指出了硅材料生产及其加工在半导体与集成电路生产中具有的重大作用与地位。
With the fast development of integrated circuit in Chinese semiconductor industry, diamond tools used for processing Si materials have a very big market. The paper briefly sums up development and prospects of Si materials and diamond tools and processing technology, and shows that the production and processing of Si materials are very important in semiconductor and interrated circuit.
