摘要
利用磁约束直流等离子体炬设备和Ａｒ＋Ｈ２＋ＣＨ４混合气体，在喷出的电弧侧面的无水冷的ＡｌＮ（氮化铝陶瓷）衬底上，成功的制备出金刚石薄膜。使用扫描电子显微镜、Ｘ射线衍射仪和Ｒａｍａｎ光谱研究了金刚石薄膜形貌、生长速率及质量。
Diamond films were synthesized by using a magnetized DC plasma jet with argon(Ar),hydrogen(H 2) and methane(CH 4) on AlN substrate without water cooling.The feature,growth rate and quality of the films were studied by scanning elactron microscopy,X ray diffration and Raman spectroscopy.
出处
《真空与低温》
1998年第4期217-219,共3页
Vacuum and Cryogenics
关键词
金刚石膜
沉积
磁约束
diamond films synthesis magnetied
