摘要
介绍了新颖的双腔结构静电柔性振膜型微泵及其工作原理。运用最小能量思想和挠度试解方法,建立了双腔静电振膜型微泵的理论分析模型。计算并讨论了驱动电压、振膜厚度、介电层厚度对微泵压缩性能的影响。计算结果表明双腔结构微泵相比单腔结构微泵,性能上有显著提高。理论模型和计算分析结果为静电柔性振膜型微泵的设计和制造提供了依据。
A new type of micro electrostatic pump with a novel dual-cavity structure is introduced. An analytical model is set up by method of minimum energy and tool of test function as well. The model is applied to analyze the parametric influences of applied voltage,membrane thickness and dielectric thickness on compression performance.The results show a great improvement in performance by structural change from single cavity into dual-cavity.The model and results are useful in future design and manufacture of micro electrostatic diaphragm pumps.
出处
《工程热物理学报》
EI
CAS
CSCD
北大核心
2010年第2期197-200,共4页
Journal of Engineering Thermophysics
基金
国家自然科学基金资助项目(No.50576054)
关键词
微泵
静电
振膜
最小能量
micro pump electrostatic diaphragm minimum energy
