TiO2纳米管阵列薄膜制备及生长机理的研究

Preparation of TiO_2 Nanotube Array Thin Films and Their Growth Mechanism

本论文采用阳极氧化的方法,在NH4HF2+NH4H2PO4的混合水溶液中于室温下以金属钛为基体原位合成氧化钛纳米管阵列薄膜。讨论了电解液成分、外加电压、溶液的pH值对氧化钛纳米管阵列薄膜微观结构及形貌的影响,并建立了阳极氧化钛纳米管阵列薄膜的生长模型。氧化钛纳米管的结构与外加电压有很大的关系,只有电压在5～35V范围内才能制备出二氧化钛纳米管阵列薄膜,其管径随着电压的升高而增加,且管径范围为30～160nm。而薄膜的厚度与电解液有关,通过控制电解液的成分及pH值,可获得厚度为6.5μm的氧化钛纳米管阵列薄膜。

The aligned TiO2 nanotube thin films were fabricated on the Ti substrate in NH4HF2＋NH4H2PO4 aqueous solution via anodic oxidation method at room temperature. The effects of electrolyte solution, outer voltage, and pH value on the morphology and microstructure of TiO2 nanotube array thin films were discussed in this study. The growth model of TiO2 nanotube array thin films was created. The results show that the outer voltage has lots of effect on the microstructure of TiO2 nanotube array thin films, the TiO2 nanotube array thin films could be formed only with the outer voltage of 3～35 V, and their diameter of TiO2 nanotube in the range of 30～160 nm increased with the outer voltage. The thickness of thin films was greatly affected by the pH value of the electrolyte solutions. The length of the TiO2 nanotube could be 6.5 μm by adjusting the anodizing factors.