微波集成电路基片复介电常数的无损测量

Microwave Nondestructive Examination of Dielectric Constants of Substrates

提出了一种测量微波集成电路基片复介电常数的新方法．通过测量贴于开口矩形波导外的介质基片的等效导纳值，可计算得到基片的介电常数和损耗角．经过理论分析，给出了修正的导纳计算公式和求解复介电常数的优化算法．对一些材料的复介电常数进行了实际测量，结果表明该测量方法运算量小，精度高，且具有设备简单，不需对样品进行特殊加工或破坏样品等优点．

A novel method for dielectric constant measurement of substrates of microwave integrated circuits is presented. The sample is attached to the surface of an open-ended rectangular waveguide,the complex permitivity is evaluated from the aperture admittance of this flange mounted waveguide. The revised formula for computing admittance and the optimizing method for solving the related equation are presented. The apparatus for the measurement is also described. The results show that this method is very simple,accurate,and nondestructive.