一维相移剪切干涉图的实时处理

The real time processing on 1-dimension phase shifting shearing interference pattern

为实现一维相移干涉图的实时处理，采用了三阶式相移方式对干涉图数据进行自动采集和分析，并由计算机直接给出最后结果．文中通过实例分析表明，对口径为１１０ｍｍ、焦距为９６１ｍｍ的抛物面形非球面，在计算口径内最大误差为０．２６４５λ，均方差为０．１０９３λ，面形检测精度达０．１μｍ．

In order to realize real-time of 1-dimension phase shifting shearing interference pattern, a third derivative phase shifting method is used to collect and analyze the interference pattern data automatically, and then, the computer gives the results directly. In this paper, the example shows that when parabolic surface aperture is 110mm, and focus is 961mm, the maximum error in the range of aperture is 0.2645λ, the mean square root error is 0.1093 λ, and the measuring precision can reach 0.1μm.