聚合物波导微环谐振器的无热化设计

Design of Athermal Polymer Waveguide Microring Resonator

从波导微环谐振器的谐振方程出发,推导出了波导微环谐振器的无热化条件和谐振波长温度依赖特性表达式,分析了硅衬底PSQ聚合物波导微环谐振器滤波功能的温度特性。通过选择合适的聚合物衬底来取代传统的硅衬底,可极大地减小聚合物波导微环谐振器的温度敏感性,给出了聚合物衬底选择的方法。研究结果表明,所设计的全聚合物波导微环谐振器,在温度从20～65℃范围内谐振波长漂移量最大值为-0.0085 nm,温度依赖波长漂移率最大值为-0.00090 nm/K,实现了无热化。

According to the resonant equation of waveguide microring resonator,the athermal condition and the temperature-dependence of resonant wavelength are deduced. The temperature-dependent properties of PSQ polymer based waveguide microring resonator are analyzed. By choosing proper polymer substrate to substitute the traditional silicon substrate, the temperature sensitivity of polymer waveguide microring resonator can be suppressed greatly, and the choice method for optimal polymer substrate is given. The results show that the designed all polymer waveguide microring resonator has the maximal resonant wavelength shift of -0. 008 5 nm and the maximal wavelength shift slope of -0. 000 90 nm · K^-1 during the temperature variation from 20℃ to 65℃ ,and the athermalization is achieved.