Electromechanical Behavior of Interdigitated SiO2 Cantilever Arrays

弯曲并且静电的激活的纳米大小的交错的伸臂数组的第一曲折模式颤动行为在真空条件下面被描绘。开车进入用餐的餐厅“在交流开车的在 dc 开车和难春天效果的效果”被观察。20 fg 的集体敏感由于手臂和相对高 Q 因素的极端小的团为我们的设备被期望。与格林的功能方法相结合的集体春天的块模型被用来适合包括开车进入用餐的餐厅电压驾驶行为的 dc。为驾驶大小写的交流，电容的力量的多项式扩大在模型被使用。成功地我们的模拟方法能被用于指导基于伸臂的传感器的几何设计的电压和难春天效果证明那的开车进入用餐的餐厅的配件。

Bending and first flexural mode vibration behavior of electrostatic actuated nanometer-sized interdigitated cantilever arrays are characterized under vacuum conditions. The pull-in＇＇ effect in dc driving and the hard spring effect＇＇ in ac driving are observed. A mass sensitivity of 20 fg is expected for our devices due to the ultra-small mass of the arm and relative high Q factor. The mass-spring lump model combined with Green＇s function method is used to fit the dc driving behaviors including the pull-in voltage. For the ac driving case, the polynomial expansion of the capacitive force is used in the model. The successfully fittings of the pull-in voltage and the hard spring effect prove that our simulation method could be used for guiding the geometrical design of cantilever-based sensors.