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静电谐波微电机的非线性动力学

Nonlinear Dynamics of Electrostatic Harmonic Micromotors
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摘要 介绍了一种基于静电驱动的新型谐波微电机,描述了该微电机的基本工作原理。分析了柔轮所受的非线性径向电场力,通过引入摄动小参数,得出了Fourier级数形式的径向载荷动态分量。运用Donnell壳理论,建立了非线性系统的动力学模型。在线性系统解的基础上,运用摄动法,通过比较系数和消除久期项,得到初始位移激励下弱非线性系统的近似解。对比发现,非线性系统的频率较线性系统的频率有所减小。讨论了非线性频率随系统参数的变化规律,给出了非线性系统动态响应的规律。 A novel harmonic micromotor actuated by electrostatic force was proposed,whose basic operating principle was also presented.The nonlinear radial electrostatic force was analyzed for the flexspline.By introducing the small parameter,the dynamic component of radial load was represented in Fourier series form.The nonlinear dynamic model was obtained by using the Donnell's shell theory.Taking into account of the corresponding linear system solution,the perturbation method was employed.By comparing the coefficients and eliminating the secular terms,the asymptotic solution was implemented for the weakly nonlinear system subjected to the initial displacement excitation.The result shows that the nonlinear frequency is less than the linear one.Finally,variation of the nonlinear frequencies with respect to system parameters was discussed.The dynamic response was summarized for the nonlinear system as well.
作者 秦磊 许立忠
出处 《微特电机》 北大核心 2010年第2期1-4,7,共5页 Small & Special Electrical Machines
基金 国家自然科学基金项目(05775195)
关键词 谐波微电机 非线性电场力 摄动法 非线性动力学 harmonic micromotor nonlinear electrostatic force perturbation method nonlinear dynamics
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参考文献8

  • 1Thielicke E, Obenneier E. Microactuators and their technologies [ J ]. Mechatronics,2000 (10) :431-455.
  • 2Judy J W. Microelectromechanical system (MEMS) : Fabrication, design and applications [ J ]. Smart Mater. Struct, 2001,10 (6) : 1115-1134.
  • 3谌贵辉,张万里,彭斌,蒋洪川.微执行器驱动机理研究[J].微电机,2005,38(1):61-63. 被引量:5
  • 4张文明,孟光.静电微电机微转子接触动力学特性分析[J].力学学报,2005,37(6):756-763. 被引量:5
  • 5Chapman P L, Krein P T. Smaller is better (Micromotors and electric drives ) [ J ]. IEEE Industry Applications Magazine, 2003,9 ( 1 ) : 62-67.
  • 6Endemano A, Desmulliez M P Y, Dunnigan M. System level simulation of a double stator wobble electrostatic micromotor [ J ]. Sensors and Actuators A: Physical,2002,99(3) :312-320.
  • 7Sarros T, Chew E C, Crase S. Investigation of cylindrical and conical electrostatic wobble micromotors [ J ]. Microelectronies Journal, 2002,33 : 129-140.
  • 8Xu L Z, Qin L. Electromechanical integrated electrostatic harmonic actuator. I Mech E Part Ⅰ: Journal of Systems and Control Engineering[ J] ,2007,221 (3) :487-495.

二级参考文献35

  • 1张健,张沛霖,钟维烈.关于钛酸铅陶瓷的压电各向异性[J].压电与声光,1996,18(5):349-353. 被引量:6
  • 2J. J. Yao. RF MEMS from a device perspective. J. [J ]. Micromech. Microeng. , 2000,10 : 9- 38.
  • 3D. J. Sadler. Micromachined spiral inductor using UV- LIGA techniaues [J].IEEE Transactions, 2001.37(4) :2897-2899.
  • 4C. R. Friedrich, J. Fang, R. O. Warrington. Micromechatrionics and the miniaturization of struttures ,devices ,and systems ,Components ,Packaging,and Manufacturing Technology, Part C [J]. IEEE Transactions on [see also Components ,Hybrids ,and Manufacturing Technology [J]. IEEE Transactions on],1997,20(1):31-38.
  • 5K. M. Dong ,U. J. Jong ,Offset compensation of capacitive sensors for electrostatic microactuators,Industrial Electronics, 2001 (3), 3 : 2114- 2117.
  • 6T. Yasuda, I. Shimoyama, H. Miura. CMOS drivable electrostatic microactuator with large deflection, Micro Electro Mechanical Systems,1997. MEMS'97[J].Proceedings, IEEE., Tenth Annual International Workshop on, 1997(1 ) :90- 95.
  • 7R. Zengerle, J. Ulrich, S. Kluge. A bi- directional silicon micropump[J]. Sensors Actuators A, 1995,50: 81-61.
  • 8D. J. Sadler, T. Miakapoulos, C. H. Alan. A universal electromagnetic microactuator using magnetic interconnection concepts [J]. Microelectromechanical Systems ,Journal, 2000(9) 4:460-468.
  • 9W. J. Li ,et,al. Design and fabrication of micromechanical variable fiber- optic attenuator. Solid- State and Integrated- Circuit Technology, 2001 [J]. Proceedings 6th International Conference on, 2001, (2)10:749-752.
  • 10M. Kurita, T. Yamazaki, H. Kohira, et, al. An active-head slider with a piezoelectroic actuator for controlling flying height, Magnetics [J].IEEE Transactions on,2002(38)5:2102-2104.

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