多层膜界面结构探测技术

Detection of multi-layer interface structure

分别以丙醇锆和正硅酸乙酯为原料,采用溶胶-凝胶工艺制备了性能稳定的ZrO2和Si O2溶胶。用旋转镀膜法在K9玻璃上分别制备了Si O2单层膜、ZrO2单层膜和ZrO2/Si O2/ZrO2三层膜。采用椭偏仪测量薄膜的厚度与折射率,用紫外-可见分光光度计测量了薄膜的透过率,利用TFCalc_Demo模系设计软件,采用三层理论模型对薄膜的透过率进行模拟,用扫描电镜(SEM)观察了三层膜的断面结构,用X射线光电子能谱仪(XPS)测量了薄膜的成分随深度方向的变化,进一步验证了ZrO2/Si O2/ZrO2三层膜之间的渗透关系,同时对多层膜的界面结构探测方法起到了借鉴作用。

The single-layer SiO2, single-layer ZrO2, ZrO2/SiO2/ZrO2 three-layer thin films were deposited on K9 glass by sol-gel spin-coating method. The colloidal suspension of ZrO2 was prepared by Zr（OPr）4 and that of SiO2 was prepared by TEOS. An ellipsometer was used to measure the thickness and refractive index of the films, and a UV-Vis spectrophotometer was used to measure the transmittance of the films. By the TFCalc thin film design software, the transmittance of the films was simulated. The vertical section of the ZrO2/SiO2/ZrO2 three-layer film was probed by scanning electron microscopy, X-ray photoelectron spectroscopy（XPS） was used to measure the variation of composition in its thickness direction, and the relationship of infiltration between the three layers was confirmed.