放电等离子体极紫外光源中的主脉冲电源

Experimental study on main pulse power supply for dicharge produced plasma extreme ultraviolet source

描述了Z箍缩放电等离子体极紫外光源系统中的主脉冲电源,给出了主电路拓扑结构,重点介绍了三级磁脉冲压缩网络,给出了关键参数的设计计算,并且介绍了新颖的末级磁脉冲压缩放电结构。实验结果显示:各级磁脉冲压缩效果达到设计指标,电源输出电压峰达30 kV,输出电流峰值大于40 kA,电流脉冲宽度200 ns,满足Z箍缩放电等离子极紫外光源对主脉冲的要求。

Extreme ultraviolet lithography（EUVL） is regarded as one of the most promising next generation lithographies. Among all the EUVL system technologies, the extreme ultraviolet source is the key issue. Compared with other light sources, gas discharge-produced plasma extreme ultraviolet source has drawn much attention around the world for its advantages in many aspects. The main pulse power generator for the Z-pinch discharge produced plasma extreme ultraviolet source is decribed in this paper, the circuit topology is presented. The critical 3-stage magnetic pulse compression is emphasized, its parameters are presented in the paper. Moreover, a novel configuration of the final magnetic pulse conpression unit is introduced. Experiment results show that each pulse compression effect meets the anticipated target, the peak value of the output voltage is 30 kV, the maximum output discharge current is 40 kA and the pulse width is 200 ns.