可调谐微机电电感(英文)

RF MEMS Tunable Inductors

射频可调谐微电感在当前发挥着重要作用,它能满足高性能紧凑型器件设计的要求。对于器件设计者来说,可调电感能调谐电感量并能保证较高或适当的品质因素(Q值),这种能力在可调谐系统中比可调电容更有优势,因为可调电容可靠性较低并且大量占用基片面积。可调电感能节省芯片面积,它为将来便携式通讯系统所需的大范围可调谐系统提供一个优选的方案。因此,从器件角度对可调电感进行综述。根据可调电感的调谐机制,可调电感可分为四大类:离散型、金属屏蔽型、磁芯调谐型和线圈耦合型。对文献报道的可调电感进行概括,讨论这些可调电感优点和缺点,同时也介绍了这些可调电感的制备工艺、结果比较和其应用等。

Radio frequency （RF） tunable inductors play a major role in current situation where compact designs with high performance are demanded. The capability of the tunable inductors, to tune the inductance with high or proper quality factor （Q-factor）, has a good advantage in the tunable systems to the designers rather than the tunable capacitors which exhibit poor reliability and require large die area. Tunable inductors could be a candidate to save die area and provide a solution for designs of the tunable systems with large tuning range for portable communication systems in the future. Therefore, a review of the tunable inductors from a device perspective is provided. Based on the tuning mechanism, the tunable inductors can be classified into four categories： discrete tuned, metal shielding tuned, magnetic core tuned and coil coupled tuned. The major contributions of the tunable inductors are ges of these contributions are discussed. Some tion, comparison and application of the tunable summarized, and the advantages and disadvantaconsiderations and results on fabrication, opera- inductors are presented.