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激光器阵列波谱合成模拟中的误差分析

Error Analysis of Laser Diode Array in Spectrum Synthesis Simulation
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摘要 利用激光器阵列波谱合成模拟软件,对808nm半导体激光器阵列的光谱进行了模拟,同时采用光谱仪对半导体激光器阵列的光谱进行了实测,通过对比模拟结果和实测结果,发现存在一定误差。结合激光器的工作原理和半导体激光器阵列制作工艺,对产生误差的原因进行了详细分析,找到了产生误差的原因,并对波谱合成软件的使用条件进行了修正,修正后的软件模拟结果很好地符合了测试结果,使模拟软件具备了工程实用条件,为提高泵浦激光器阵列的光谱参数的一致性及成品率奠定了基础。 The spectrum of the 808 nm semiconductor laser diode array was simulated by the spectrum synthesis software of the laser diode array, and was measured by spectrometer. There are some errors between the simulated and measured results. Combined with the operating principle of laser diodes and the fabricating process of diode arrays, the reason of the errors was analyzed and found. The application conditions of spectrum synthesis software were readjusted. The spectrum results simulated by software modified are coincidence with the measure results. The spectrum synthesis software meets with practical application and makes the foundation for improving the spectrum consistency of pumping diode arrays and yield in batch.
出处 《微纳电子技术》 CAS 北大核心 2010年第3期142-146,共5页 Micronanoelectronic Technology
关键词 半导体激光器 中心波长 半宽 波谱合成 激光器阵列 semiconductor laser central wavelength FWHM spectrum synthesis laser diode array (LDA)
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