Nb掺杂TiO_2纳米管的制备及其氢敏特性

Fabrication and Hydrogen Sensing Properties of Nb-Doped TiO_2 Nanotubes

以Ti35Nb合金为基材,通过阳极氧化和中温热处理制备了Nb掺杂TiO2纳米管阵列。通过掩模版和磁控溅射技术在纳米管阵列表面形成了Pt电极,随后在低浓度H2气氛中测试了Nb掺杂TiO2纳米管阵列的氢敏性能。实验结果表明阳极氧化温度是影响纳米管生长的一个重要因素,在阳极氧化电压为15V和阳极氧化温度为30℃的条件下可以获得均匀开口的非晶纳米管阵列。将非晶纳米管在450℃热处理后可以获得锐钛矿结构纳米管阵列。氢传感实验结果表明,Nb掺杂TiO2纳米管对低浓度气氛具有室温氢敏特性。以上实验结果表明,通过合金化设计和阳极氧化可以制备出具有室温氢传感特性的掺杂纳米管阵列。

With Ti35Nb alloy as a substrate, Nb-doped TiO2 nanotube arrays were fabricated through the anodization and mid-temperature heat-treatment. The Pt electrode was fabricated on the surface of the nanotube arrays through the mask and sputtering technique. Hydrogen sensing properties of the Nb-doped TiO2 nanotube arrays were tested in the dilute hydrogen atmosphere. Experimental results indicate that the anodization temperature has a great impact on the formation of uniform nanotubes. Under an anodization voltage of 15 V and anodization temperature of 30℃, the noncrystalline nanotube arrays with uniform open could be fabricated. The nanotube arrays with the anatase struture were obtained after the noncrystalline nanotubes were heat-trea- ted at 450℃. Hydrogen sensing testings reveal that the Nb-doped TiO2 nanotubes have the room-temperature hydrogen sensing properties in the dilute hydrogen atmosphere. The above results show that the doped nanotube arrays with the room-temperature hydrogen sensing properties canbe fabricated by alloying design and anodization.