共振隧穿微陀螺仪哥氏效应仿真及理论验证

Simulation and Theoretical Validation of Coriolis Effect in Resonant Tunneling Micro Gyroscope

介绍了微机械陀螺和共振隧穿效应器件的工作原理,提出了基于共振隧穿效应的微机械陀螺仪结构.利用ANSYS软件仿真分析了输入角速度、角加速度及驱动速度对哥氏效应的影响.对微陀螺仪的检测结构进行了理论建模,详细分析了输入角速度、哥氏力、检测梁正应力三者间的关系,并推导出检测梁正应力的理论计算关系式.经数据分析验证了计算结果与仿真结果是一致的,说明基于ANSYS软件的仿真分析方法是可行的,能够用于共振隧穿微陀螺仪的结构设计中.

The principle of micro-mechanical gyroscope and operating mechanics of resonant tunneling effect device were introduced. The micro-mechanical gyroscope structure based on the resonant tunneling effect was proposed. The effect of input angular velocity, angular acceleration and driving speed to Coriolis effects was analyzed by ANSYS software. A theoretical model of micro gyroscope detection structure was established, and the relationship among input angular velocity, Coriolis force and the normal stress of detection beam were analysis in detail. Then the theoretical calculations formula of normal stress of detection beam was derived. It is verified that the calculation results and simulation results are consistent by data analysis, and the ANSYS simulation method is feasible which can be used for the structure design of resonant tunneling micro-gyroscope.