铁电薄膜电滞回线测量研究

Research for Measuring Hysteresis Loops of Ferroelectric Thin Films

在总结铁电材料测量理论基础上，运用相量的概念从理论上导出了铁电薄膜的线性感应电容和漏导对测量电滞回线所产生的影响。根据铁电薄膜的特性与实测结果分析了电极和测试信号的频率对测量的影响，提出了在测试过程中对铁电薄膜制备微电极和适当提高测试信号频率的优越性。

Influence of linear induction capacitance and leakage conductance of ferroelectric thin films on measuring hysteresis loops is developed from theory, which is based on seriously summarizing the measurement theory of ferroelectric materials and using the conception of phasor. On the basis of characteristics of ferroelectric thin films andpractical measuring results, influence of electrodes and signal frequency on measurement result is analyzed, it has beensuggested that fabrication of little electrodes and increasing signal frequency are of interest to measurement.