用于微机械器件和微电子机械系统的关键技术——微机械技术

MICROMACHINING TECHNOLOGIES —KEY TECHNOLOGIES FOR MICROMACHINED DEVICES AND MICRO ELECTRO MECHANICAL SYSTEMS

微机械技术是研究，生产微机械器件和微电子机械系统的关键技术，熟练掌握并不容易。本文总结了三个单位为时数年在微机械技术方面的研究成果，重点介绍我们首创的三项技术，即自对准的准三维加工技术，硅三维结构的无掩模腐蚀技术和硅／硅低温直接键合技术，也提到我们开展过的其他几项微机械技术以及所制作的几种微机械器件的参数或结果。

Micromachining technologies, the key technologies in research and production of micromachined devices and micro electro mechanical systems, are not easy to manage. In this paper, we, three institutions, reviewed our achievements on micromachining technologies within the recent years. The first developed technologies, including the self aligned quasi three dimensional fabrication technology, Si three dimensional maskless etching technology and Si/Si low temperature direct bonding technology were mainly introduced. Some other developed technologies and fabricated micromachined devices together with its parameters were also presented.