摘要
分析三氯氢硅合成工艺、精馏工艺中存在的技术问题并进行了改进,介绍了技改取得的效果,并指出今后技改的方向。
Technical problems existed in synthesis process and rectification process of trichlorosilane were analyzed and improved. The effects of technical improvements were introduced. The future direction of technical improvements was pointed out.
出处
《氯碱工业》
CAS
2010年第2期28-30,共3页
Chlor-Alkali Industry
关键词
三氯氢硅
合成工艺
精馏工艺
氯化氢
除尘
水分
尾气
trichlorosilane
synthesis process
rectification process
hydrogen chloride
dust removal
water content
tail gas
