迈克尔逊干涉测薄膜厚度

Measurement of Film Thickness by Michelson's Interferometer

利用迈克尔逊干涉原理测量薄膜厚度的方法,以测量PE保鲜膜和透明塑料膜为例,采用白光干涉产生的彩色条纹来精确测量薄膜的厚度,通过采集干涉产生的实验数据,计算出薄膜的厚度,这是一种实用有效的方法。此方法的测量范围为1μm～1cm,测量精度为0.1μm。

Measurement of film thickness by using Michelson＇s interfere principle has been introduced in this paper. As the examples,the film thicknesses of the PE clear plastic wrap and transparent plastic film have been measured. It is a kind of practical and valid method that exactly measures the film thickness by using colored fringe that originates from white-light interference and calculates the film thickness by collecting experimental data of interference. The measuring range of this method is between 1μm and 1 cm,and the resolution is 0.1μm.