蚀刻深度传感器耦合问题的研究

The Study of Coupling Problem on Etching depth Sensor

对离子束蚀刻深度传感器敏感元件与传感元件间的耦合问题进行了探讨。表明敏感元件的振动对蚀刻深度的测量结果有较大影响。给出了振动误差的抑制措施。

The coupling problem between sensitive element and sensing element in etching depth sensor is discussed. It shows that the measurement result of etching depth is quite influenced by the vibration of sensitive element. The removing method on the vibration error is given.