ZSH-Ⅲ 型自动砂轮划片机

ZSH Ⅲ Automatic Wheel Scriber

】ＺＳＨ－Ⅲ型自动砂轮划片机是用于半导体生产企业的精密专用设备。本文介绍了ＺＳＨ－Ⅲ型自动砂轮划片机的设计思想、设计方案、主要技术关键、主要技术参数以及存在的问题。该设备已经小批量生产。

ZSH Ⅲ automatic wheel scriber is a precise special equipment for semicondutor production.It is introduced in this paper the design conception,design programme,major key technologies and technic prameters as well as the problems of the ZSH Ⅲ automatic whell scriber Atpresent the equipment is going into small scale production.