摘要
激光技术自诞生以来,受到了广泛地关注,并逐步拓展了其应用领域。对激光技术在晶片/芯片加工领域的应用、激光打标技术、激光测试技术以及激光脉冲退火技术(LSA)进行简要的介绍。
Laser Technology had been paid attention widely since it was developed. The article was addressed on application of laser technology in semiconductor. It was introduced that laser mark technology, laser slicing technology, laser scalpeling gound technology, and laser signal annealing technology.
出处
《电子工业专用设备》
2010年第2期10-13,共4页
Equipment for Electronic Products Manufacturing
关键词
激光
激光打标
激光测试
脉冲退火技术
laser
laser mark
laser measurement
laser signal annealling
