摘要
将GaAs/AlGaAs多量子阱光探测器、光调制器与GaAs场效应晶体管(FET)混合集成,构成FET-SEED灵巧象元。光探测器和光调制器均为反射型自电光效应器件(SEED),光源为骨子阱半导体激光器。测出的光输出Pout/光输入Pin特性表明,光输入信号对光输出信号有明显的调制作用,光输入信号较小的变化可以导致光输出信号较大的变化。
We experimentally demonstrate the operation of a hybrid integrated optoelectronic circuit with optical input and output consisting of a GaAs/AlGaAs multiple-quantum-well(MQW) photodetector, modulator and GaAs metal semiconductor field effect transistor(MESFET). Photodetector and modulator are reflective self electrooptic effect device (SEED). A low optical power input causes a modulation of a higher optical power output.
出处
《固体电子学研究与进展》
CAS
CSCD
北大核心
1998年第4期343-348,共6页
Research & Progress of SSE
基金
国家集成光电子学联合实验室(半导体所区)开放课题